Fault or Failure |
Applies to |
Low or high pressure where laser tube is physically intact |
Lexel 75/85/95 Spectra-Physics 164/165/166/168 Spectra-Physics 170/171 |
Cathode sag or failure and/or Brewster window
contamination |
Lexel 75/85/95 Spectra-Physics 164/165/166/168 Spectra-Physics 170/171 |
|
Anode bellows failure |
Spectra-Physics 164/165/166/168 Spectra-Physics 170/171 |
Total laser tube failure - needs replacement plasma laser tube |
Lexel 75/85/95 Spectra-Physics 164/165/166/168 white-light & mixed-gas Spectra-Physics 170/171 |
|
Laser power supply or exciter failure |
All Models |





